Micromachined Gas Sensors Based on Au-functionalized SnO2 Nanorods Directly Integrated without Catalyst Seeds via AA-CVD

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Date
2016-09-07
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Mark
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Elsevier
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Abstract
Tin oxide nanorods functionalized with Au nanoparticles are vapour synthesised at relatively lower temperatures than previously reported and without the need of catalyst seeds using co-deposition method via aerosol-assisted chemical vapour deposition. These functionalized structures formed directly, in a single-step process, on silicon micromachined platforms are tested toward H2, showing 12-fold greater response, 6-fold faster response time and better selectivity to CO compared to a similar non-functionalized system. Results show the significance of these method to form highly gas sensitive nanostructures compatible with the complementary electronic for the fabrication of gas microsensor devices.
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Procedia Engineering. 2016, vol. 168, issue 1, p. 1078-1081.
https://www.sciencedirect.com/science/article/pii/S187770581633658X
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Peer-reviewed
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en
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International
http://creativecommons.org/licenses/by-nc-nd/4.0/
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