SVATOŠ, V. Návrh a simulace čipu mikrobolometru v MEMS technologii [online]. Brno: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. 2014.
Student Vojtěch Svatoš belongs to a few active students who spend all their leisure time in laboratory. His focus was directed to microtechnologies and todays he handles range of apparatuses from our thin-film facility without any problem. Because of thesis instruction he had to focus as well on a design and fabrication of MEMS devices. The design of bolometer which is objective of the thesis represents to work with tools as CowentorWare which enables behavioural simulation of designed devices following with CADENCE tools for design of device topography followed by mask fabrication. In a frame of the work the technology procedure of fabrication was designed with KIST-Europe, and the fabrication is provided in collaboration with KIST-EUROPE and IBMT-Fraunhoffer Institute (Saarbrücken, Germany). The student spent two weeks in Germany for the fabrication reason. Due to technologies problem and not enough time on the IBMT side, the fabrication has not been finished in time and involved into the thesis. The student involved into the thesis also the plan of next steps, which will be provided after finishing of bolometers. Whole work is written in English due to references available, its international and scientific aspect, because the work is a part of one project of Grant Agency of Czech Republic which is solved in the group and it will be published in journal. Even the last part of thesis instruction was not complied for reason on the third side, the work has high merit and also due to activity of the student I evaluate his work as excellent/A.
The master thesis written by Vojtěch Svatoš was focused on the infrared detector called bolometer. The task was to improve the infrared detection by using different type of absorption layer modified by carbon nanotubes. In the theoretical part, there are described basic terms of thermal engineering and basic definitions of bolometer physics. There is an overview of nowadays IR technology and short mention of history as well. In the practical part, the thermo-mechanical simulations are evaluating the operation behavior. PSpice model of bolometer is created combing the thermal and electrical properties of the bolometer chip. Subsequently, the bolometer design and fabrication process is presented and described in detail. Unfortunately, the fabrication and the characterization measurements of bolometer chip were not successful. The fabrication process was initiated but the student did not succeed in finding an available facility to fabricate bolometer chips. The chosen theme is highly topical and challenging, the amount of work is impossible to catch during one year as a master thesis. I would rather recommend this topic to Mr. Svatoš for the dissertation. References are appropriate and relate to the topic. The formal processing of the thesis meets the required standards and it is at a good level. Thesis written in English makes a good impression, but the abstract in Czech language is much worse. It is written in an incomprehensible way with mistakes. A minimum of spelling mistakes and typos can be found in the thesis (e. g. hezahearda on page 37, trenched on page 39, I-C curve in description of Fig. 4.7, lux on page 48). For all reasons mentioned above, I fully support Mr. Svatoš’s thesis to be defended and evaluate the degree B/85 points.
eVSKP id 74259