Browsing by Subject "Magnetron sputtering"
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Electrical and optical study of transparent V-based oxide semiconductors prepared by magnetron sputtering under different conditions
(Společnost pro radioelektronické inženýrství, 2011-04)This work is focused on structural, optical and electrical behaviors of vanadium-based oxide thin films prepared by magnetron sputtering under different conditions. Thin films have been deposited on glass substrates from ...