Simulation And Fabrication Of Piezoelectric Mems Resonators
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Date
2017
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Mark
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Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract
This paper presents FEM analyses and fabrication of piezoelectric MEMS resonators. Modal and harmonic analyses were made using Ansys® Workbench. These simulations showed the influence of resonators geometry on their out-of-plane displacement and corresponding resonant frequencies. Piezoelectric resonators were fabricated by standard microfabrication processing compatible with complementary metal-oxide-semiconductor (CMOS) technology.
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Proceedings of the 23st Conference STUDENT EEICT 2017. s. 102-104. ISBN 978-80-214-5496-5
http://www.feec.vutbr.cz/EEICT/
http://www.feec.vutbr.cz/EEICT/
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en
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© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií