Simulation And Fabrication Of Piezoelectric Mems Resonators
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This paper presents FEM analyses and fabrication of piezoelectric MEMS resonators. Modal and harmonic analyses were made using Ansys® Workbench. These simulations showed the influence of resonators geometry on their out-of-plane displacement and corresponding resonant frequencies. Piezoelectric resonators were fabricated by standard microfabrication processing compatible with complementary metal-oxide-semiconductor (CMOS) technology.
Document typePeer reviewed
Document versionFinal PDF
SourceProceedings of the 23st Conference STUDENT EEICT 2017. s. 102-104. ISBN 978-80-214-5496-5
- Student EEICT 2017