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Double-Beam Mach-Zehnder Interferometer Forthin Piezoelectric Films Measurement

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Date
2017
Author
Skalský, Michal
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Abstract
This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.
Keywords
Laser interferometry, Mach-Zehnder interferometer, double-beam, thin piezoelectric films
Persistent identifier
http://hdl.handle.net/11012/187142
Document type
Peer reviewed
Document version
xmlui.vut.verze.Publishers's version
Source
Proceedings of the 23st Conference STUDENT EEICT 2017. s. 441-445. ISBN 978-80-214-5496-5
http://www.feec.vutbr.cz/EEICT/
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  • Student EEICT 2017 [174]
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