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dc.contributor.authorSkalský, Michal
dc.date.accessioned2020-05-07T09:40:31Z
dc.date.available2020-05-07T09:40:31Z
dc.date.issued2017cs
dc.identifier.citationProceedings of the 23st Conference STUDENT EEICT 2017. s. 441-445. ISBN 978-80-214-5496-5cs
dc.identifier.isbn978-80-214-5496-5
dc.identifier.urihttp://hdl.handle.net/11012/187142
dc.description.abstractThis paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.en
dc.formattextcs
dc.format.extent441-445cs
dc.format.mimetypeapplication/pdfen
dc.language.isoencs
dc.publisherVysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.relation.ispartofProceedings of the 23st Conference STUDENT EEICT 2017en
dc.relation.urihttp://www.feec.vutbr.cz/EEICT/cs
dc.rights© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.subjectLaser interferometryen
dc.subjectMach-Zehnder interferometeren
dc.subjectdouble-beamen
dc.subjectthin piezoelectric filmsen
dc.titleDouble-Beam Mach-Zehnder Interferometer Forthin Piezoelectric Films Measurementen
eprints.affiliatedInstitution.departmentFakulta elektrotechniky a komunikačních technologiícs
but.event.date27.04.2017cs
but.event.titleStudent EEICT 2017cs
dc.rights.accessopenAccessen
dc.type.driverconferenceObjecten
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen


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