Influence Boundary Layer In The Differentially Pumped Chamber
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The goal of this thesis is the analysis of a gas flowing through the drain channels within the apertures of differentially pumped chamber of the Environmental Scanning Electron Microscope (ESEM). This thesis contains a verification of current simulation results of gas flow within the differentially pumped chamber published by D. Danilatos using Monte Carlo method in comparison with simulation results achieved by using simulation program ANSYS Fluent, which uses the mechanism of continuum for its calculations and where it was effect of the boundary layer taken into account.
KeywordsANYSY Fluent, Environmental Scanning Electron Microscope, ESEM, Monte Carlo, Boundary layer, Wall Functions
Document typePeer reviewed
Document versionFinal PDF
SourceProceedings of the 23st Conference STUDENT EEICT 2017. s. 496-500. ISBN 978-80-214-5496-5
- Student EEICT 2017