Afm Of Hopg: Case Study Of Hopg Milling
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The purpose of this work is study of highly oriented pyrolytic graphite (HOPG) processed by focused ion beam (FIB) using atomic force microscopy (AFM) and Raman spectroscopy. Due of its properties, HOPG have a promising potential and wide range of applications in nanotechnology. AFM demonstrates quality of the pattern created by FIB: topography of patterned area, shape of the edges, etc. Raman spectroscopy indicates defectiveness of the near surface area occurred due to FIB processing.
Document typePeer reviewed
Document versionFinal PDF
SourceProceedings I of the 26st Conference STUDENT EEICT 2020: General papers. s. 159-162. ISBN 978-80-214-5867-3
- Student EEICT 2020