Micromachined Gas Sensors Based on Au-functionalized SnO2 Nanorods Directly Integrated without Catalyst Seeds via AA-CVD

Abstract

Tin oxide nanorods functionalized with Au nanoparticles are vapour synthesised at relatively lower temperatures than previously reported and without the need of catalyst seeds using co-deposition method via aerosol-assisted chemical vapour deposition. These functionalized structures formed directly, in a single-step process, on silicon micromachined platforms are tested toward H2, showing 12-fold greater response, 6-fold faster response time and better selectivity to CO compared to a similar non-functionalized system. Results show the significance of these method to form highly gas sensitive nanostructures compatible with the complementary electronic for the fabrication of gas microsensor devices.