Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber.

Abstract

The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.