An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor
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The effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution – only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a compromise solution, the effect of the humid atmosphere and the moisture on the exterior of an LTCC-based capacitive pressure sensor was inspected closely through experimental and numerical analyses of various situations.
KeywordsCapacitive pressure sensor, LTCC, fringe electric field, stray capacitances, finite-element analysis
Document typePeer reviewed
Document versionFinal PDF
SourceRadioengineering. 2012, vol. 21, č. 1, s. 201-206. ISSN 1210-2512
- 2012/1