An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor
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Date
2012-04
Authors
ORCID
Advisor
Referee
Mark
Journal Title
Journal ISSN
Volume Title
Publisher
Společnost pro radioelektronické inženýrství
Abstract
The effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution – only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a compromise solution, the effect of the humid atmosphere and the moisture on the exterior of an LTCC-based capacitive pressure sensor was inspected closely through experimental and numerical analyses of various situations.
Description
Citation
Radioengineering. 2012, vol. 21, č. 1, s. 201-206. ISSN 1210-2512
http://www.radioeng.cz/fulltexts/2012/12_01_0201_0206.pdf
http://www.radioeng.cz/fulltexts/2012/12_01_0201_0206.pdf
Document type
Peer-reviewed
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en