Characterization of Nonlinear Integrated Capacitors
Loading...
Date
2008-12
Authors
ORCID
Advisor
Referee
Mark
Journal Title
Journal ISSN
Volume Title
Publisher
Společnost pro radioelektronické inženýrství
Abstract
The paper deals with a modified CBCM (Charge-Based Capacitance Measurements) method for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in the 0.35μm CMOS process. Verifica- tion against known capacitances proved the correctness and accuracy of the method. It was successfully used for MOSCAPs characterization.
Description
Citation
Radioengineering. 2008, vol. 17, č. 4, s. 9-14. ISSN 1210-2512
http://www.radioeng.cz/fulltexts/2008/08_04a_009_014.pdf
http://www.radioeng.cz/fulltexts/2008/08_04a_009_014.pdf
Document type
Peer-reviewed
Document version
Published version
Date of access to the full text
Language of document
en