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  • Optical Characterization of Non-Stoichiometric Silicon Nitride Films Exhibiting Combined Defects 

    Vohánka, Jíří; Ohlídal, Ivan; Ohlídal, Miloslav; Šustek, Štěpán; Čermák, Martin; Šulc, Václav; Vašina, Petr; Ženíšek, Jaroslav; Franta, Daniel (MDPI, 2019-06-28)
    The study was devoted to optical characterization of non-stoichiometric silicon nitride films prepared by reactive magnetron sputtering in argon-nitrogen atmosphere onto cold (unheated) substrates. It was found that these ...