Browsing Ústav fyzikálního inženýrství by Author "Ohlídal, Ivan"

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Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films

Ohlídal, Ivan; Vohánka, Jíří; Buršíková, Vilma; Šulc, Václav; Šustek, Štěpán; Ohlídal, Miloslav (Optical Society of America, 2020-11-23)

The method of variable angle spectroscopic ellipsometry usable for the complete optical characterization of inhomogeneous thin films exhibiting complicated thickness non-uniformity together with transition layers at their ...
Optical Characterization of Non-Stoichiometric Silicon Nitride Films Exhibiting Combined Defects

Vohánka, Jíří; Ohlídal, Ivan; Ohlídal, Miloslav; Šustek, Štěpán; Čermák, Martin; Šulc, Václav; Vašina, Petr; Ženíšek, Jaroslav; Franta, Daniel (MDPI, 2019-06-28)

The study was devoted to optical characterization of non-stoichiometric silicon nitride films prepared by reactive magnetron sputtering in argon-nitrogen atmosphere onto cold (unheated) substrates. It was found that these ...