Analysis of Whirling of Gas Flow within the Specimen Chamber of ESEM
The usage of an Environmental scanning electron microscope (ESEM) brings the possibility of studying many kinds of materials and chemical reactions never studied before. In this article there are compared and analyzed several simulation results of gas flow in the specimen chamber of ESEM with high gas pressure throughout the whole volume except on its optical axis, where low gas pressure is needed.
KeywordsANSYS Fluent, Electron microscopy, Environmental scanning electron microscope, ESEM, Gas whirling, SolidWorks, Specimen chamber, Von Karman vortex
Document typePeer reviewed
Document versionxmlui.vut.verze.Publishers's version
SourceProceedings of the 22nd Conference STUDENT EEICT 2016. s. 595-599. ISBN 978-80-214-5350-0
- Student EEICT 2016