Double-Beam Mach-Zehnder Interferometer Forthin Piezoelectric Films Measurement

Loading...
Thumbnail Image
Date
2017
ORCID
Advisor
Referee
Mark
Journal Title
Journal ISSN
Volume Title
Publisher
Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract
This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.
Description
Citation
Proceedings of the 23st Conference STUDENT EEICT 2017. s. 441-445. ISBN 978-80-214-5496-5
http://www.feec.vutbr.cz/EEICT/
Document type
Peer-reviewed
Document version
Published version
Date of access to the full text
Language of document
en
Study field
Comittee
Date of acceptance
Defence
Result of defence
Document licence
© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
DOI
Citace PRO