High aspect ratio Parylene C micropillars formed by molding and ION-BEAM etching method

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dc.contributor.authorFohlerová, Zdenkacs
dc.contributor.authorFecko, Petercs
dc.contributor.authorGablech, Imrichcs
dc.contributor.authorKošelová, Zuzanacs
dc.date.accessioned2022-08-05T14:54:34Z
dc.date.available2022-08-05T14:54:34Z
dc.date.issued2022-03-21cs
dc.description.abstractThis paper represents the molding and plasma etching method for developing a high aspect ratio parylene C pillar array. The silicon mold was fabricated using the modified Bosch process. The parylene was deposited by chemical vapor deposition into the silicone holes, followed by the etching of silicon to obtain the transparent membrane of hollow parylene C pillars. The etching method was initialized by transferring the pattern on the hard titanium mask via standard photolithography, followed by titanium etching. The oxygen plasma ion-milling of parylene C produced the flexible pillars standing on the silicon substrate. Both pillar arrays were characterized by scanning electron microscopy. Arrays of micropillars could be applicable for measuring cellular forces or as the bioinspired platform with modulated surface chemistry.en
dc.formattextcs
dc.format.extent1-4cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationNANOCON Conference Proceedings - International Conference on Nanomaterials. 2022, p. 1-4.en
dc.identifier.doi10.37904/nanocon.2021.4349cs
dc.identifier.isbn9788088365006cs
dc.identifier.other178619cs
dc.identifier.urihttp://hdl.handle.net/11012/208223
dc.language.isoencs
dc.publisherTANGERcs
dc.relation.ispartofNANOCON Conference Proceedings - International Conference on Nanomaterialscs
dc.relation.urihttps://www.confer.cz/nanocon/2021/4349-high-aspect-ratio-parylene-c-micropillars-for-cellular-force-measurementcs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectEtchingen
dc.subjectMicropillarsen
dc.subjectMoldingen
dc.subjectParylene Cen
dc.titleHigh aspect ratio Parylene C micropillars formed by molding and ION-BEAM etching methoden
dc.type.driverconferenceObjecten
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-178619en
sync.item.dbtypeVAVen
sync.item.insts2023.02.07 16:56:34en
sync.item.modts2023.02.07 16:15:35en
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav mikroelektronikycs
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